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    • 6. 发明申请
    • METHOD FOR MANUFACTURING ARRAY SUBSTRATE
    • 制造阵列基板的方法
    • US20080213949A1
    • 2008-09-04
    • US12005289
    • 2007-12-27
    • Chun-Hao Tung
    • Chun-Hao Tung
    • H01L21/84
    • H01L27/1288H01L27/1214
    • A method for manufacturing a substrate for a flat panel display device is disclosed. The present method uses photolithography with four masks to manufacture a TFT-LCD. After the third half-tone mask is used, the manufacturing of the TFTs and the defining of the pixel area of the substrate can be completed. The present method can avoid the alignment deviation and the generation of parasitic capacitance happened on the substrate made through the conventional photolithography with five masks. Therefore, the present method can reduce the costs and increase the yield. Moreover, the substrate for the TFT-LCD made by the present method can define a channel region in the semiconductor layer after the second half-tone mask. Hence, the subsequent manufacturing for forming a transparent conductive layer, a source, and a drain can be achieved by wet etching to effectively reduce the non-homogeneous etching for the channel region in the semiconductor layer.
    • 公开了一种用于制造平板显示装置用基板的方法。 本方法使用具有四个掩模的光刻制造TFT-LCD。 在使用第三半色调掩模之后,可以完成TFT的制造和衬底的像素区域的限定。 本方法可以避免通过具有五个掩模的常规光刻制成的衬底上发生的对准偏差和寄生电容的产生。 因此,本方法可以降低成本并提高产量。 此外,通过本方法制造的用于TFT-LCD的衬底可以在第二半色调掩模之后限定半导体层中的沟道区。 因此,用于形成透明导电层,源极和漏极的后续制造可以通过湿式蚀刻来实现,以有效地减少半导体层中的沟道区域的非均匀蚀刻。
    • 7. 发明申请
    • Mask and fabrication method thereof and application thereof
    • 掩模及其制造方法及其应用
    • US20070154816A1
    • 2007-07-05
    • US11413735
    • 2006-04-28
    • Chun-Hao Tung
    • Chun-Hao Tung
    • G03C5/00G03F1/00
    • G03F1/32G03F1/50G03F1/54
    • A mask including a transparent substrate, a semi-transparent layer and a film layer is provided. The transparent substrate at least has a first region, a second region and a third region. The semi-transparent layer covers the second region and the third region of the transparent substrate and exposes the first region. The film layer covers the halftone layer disposed at the third region, to make the transmittance of the third region lower than that of the second region. The halftone layer and the film can be made of phase shift layers, to form a phase shift mask. Besides, several fabrication methods of the mask are also disclosed to form the above-mentioned mask.
    • 提供了包括透明基板,半透明层和膜层的掩模。 透明基板至少具有第一区域,第二区域和第三区域。 半透明层覆盖透明基板的第二区域和第三区域并暴露第一区域。 膜层覆盖设置在第三区域的半色调层,以使第三区域的透射率低于第二区域的透射率。 半色调层和膜可以由相移层制成,以形成相移掩模。 此外,还公开了掩模的几种制造方法以形成上述掩模。
    • 8. 发明申请
    • Mask and manufacturing method thereof
    • 掩模及其制造方法
    • US20070059611A1
    • 2007-03-15
    • US11444546
    • 2006-05-31
    • Chun-Hao TungChia-Tsung LeeHsien-Kai TsengHorino Shigekazu
    • Chun-Hao TungChia-Tsung LeeHsien-Kai TsengHorino Shigekazu
    • G03C5/00G03F1/00
    • G03F1/32G03F1/54
    • A mask and a manufacturing method thereof are provided. A transparent substrate having three regions is provided first. A non-transmitting layer is formed in a first region of the transparent substrate. Then, a first photoresist layer is formed on the transparent substrate, and the first photoresist layer exposes a second region of the transparent substrate. Next, a first transmitting layer is formed on the transparent substrate and the first photoresist layer. Finally, the first photoresist layer is removed. The first transmitting layer on the first photoresist layer is removed at the same time and the first transmitting layer in the second region of the transparent substrate is remained and a third region of the transparent substrate is exposed. A lift-off process is used in the mask manufacturing method of the present invention to form the transmitting layer.
    • 提供了一种掩模及其制造方法。 首先设置具有三个区域的透明基板。 在透明基板的第一区域中形成非透光层。 然后,在透明基板上形成第一光致抗蚀剂层,第一光致抗蚀剂层露出透明基板的第二区域。 接下来,在透明基板和第一光致抗蚀剂层上形成第一透光层。 最后,去除第一光致抗蚀剂层。 同时去除第一光致抗蚀剂层上的第一透射层,并且保留透明基板的第二区域中的第一透射层,并露出透明基板的第三区域。 在本发明的掩模制造方法中使用剥离处理来形成透射层。
    • 9. 发明授权
    • Method for manufacturing array substrate
    • 阵列基板的制造方法
    • US08551822B2
    • 2013-10-08
    • US12005289
    • 2007-12-27
    • Chun-Hao Tung
    • Chun-Hao Tung
    • H01L21/00
    • H01L27/1288H01L27/1214
    • A method for manufacturing a substrate for a flat panel display device is disclosed. The present method uses photolithography with four masks to manufacture a TFT-LCD. After the third half-tone mask is used, the manufacturing of the TFTs and the defining of the pixel area of the substrate can be completed. The present method can avoid the alignment deviation and the generation of parasitic capacitance happened on the substrate made through the conventional photolithography with five masks. Therefore, the present method can reduce the costs and increase the yield. Moreover, the substrate for the TFT-LCD made by the present method can define a channel region in the semiconductor layer after the second half-tone mask. Hence, the subsequent manufacturing for forming a transparent conductive layer, a source, and a drain can be achieved by wet etching to effectively reduce the non-homogeneous etching for the channel region in the semiconductor layer.
    • 公开了一种用于制造平板显示装置用基板的方法。 本方法使用具有四个掩模的光刻制造TFT-LCD。 在使用第三半色调掩模之后,可以完成TFT的制造和衬底的像素区域的限定。 本方法可以避免通过具有五个掩模的常规光刻制成的衬底上发生的对准偏差和寄生电容的产生。 因此,本方法可以降低成本并提高产量。 此外,通过本方法制造的用于TFT-LCD的衬底可以在第二半色调掩模之后限定半导体层中的沟道区。 因此,用于形成透明导电层,源极和漏极的后续制造可以通过湿式蚀刻来实现,以有效地减少半导体层中的沟道区域的非均匀蚀刻。